주요구성 및 성능 |
1. Plasma chamber - Φ 110 mm, L 300 mm (glass type)
2. Gas connection - 1 pcs, gas channel controlled with needle valve or MFC
3. Plasma power - 13.56 MHz, 350 W
4. Electric control - manual, semi automatic, full automatic (PC or Touch screen control)
5. Connections - Gas: 1/8”tube fittings - Power: AC 220 V/ 60 Hz
6. Vacuum pump - Rotary type: 20~30 L/min |